Search for: [Abstrakt = "In this paper, the results of investigation of the influence of cathode current on optical and dielectric AlNx thin\-film properties are presented. AlNx films were prepared by pulsed DC reactive magnetron sputtering of Al target on substrates at room temperature. For characterization of fabricated test structures C\-V spectroscopy, ellipsometry measurement and atomic force microscopy \(AFM\) were used."]

Number of results: 1