Micromirrors inclined at 45° towards Si substrates fabricated by anisotropic etching - Zubel, Irena; Rola, Krzysztof (Oficyna Wydawnicza Politechniki Wrocławskiej, 2011)
Optica Applicata, Vol. 41, 2011, Nr 2, s. 417-422
Keywords: optyka; micro-opto-electro-mechanical systems (MOEMS); micromirrors; silicon anisotropic etching