Optimization of radio frequency inductively coupled plasma enhanced chemical vapour deposition process of diamond-like carbon films - Kijaszek, Wojciech; Oleszkiewicz, Waldemar (Oficyna Wydawnicza Politechniki Wrocławskiej, 2016)
Optica Applicata, Vol. 46, 2016, nr 2, s. 167-172
Keywords: optyka; diamond-like carbon; radio frequency inductively coupled plasma enhanced chemical vapourdeposition (RF ICP PECVD); Raman scattering spectroscopy; spectroscopic ellipsometry