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Search for: [Subject and Keywords = "electron beam lithography \(EBL\)"]

Number of results: 2

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Optica Applicata
Optica Applicata

Exposition time analysis of AlGaN/GaN HEMT fabrication by electron beam lithography

Indykiewicz, Kornelia Paszkiewicz, Bogdan Paszkiewicz, Regina Urbańczyk, Wacław. Redakcja

2019
artykuł
Optica Applicata
Optica Applicata

Improvement of the electron beam lithography contact pads fabrication process

Indykiewicz, Kornelia Paszkiewicz, Regina Paszkiewicz, Bogdan Urbańczyk, Wacław. Redakcja

2016
artykuł

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